V-Spec
Non-contact Dry Cleaner
Ultimate non-contact Dry Cleaner meeting the demands of the advanced technologies. By using Multilevel contraction nozzle design which generates a non-spreading high sharp air flow reaches the surface of substrate strongly and removes even micro dust.
HIGHLIGHTS
Usable for ultra-thin substrate (0,04 mm)
Significantly improvement in comparison to the conventional design
High performance Air nozzle (V-Spec)
Multilevel contraction nozzle
No contact damage/no transcription and less static electricity
High speed cleaning
