Hakuto
HAP 5030iS / HAP 5030iST

Double sided full automatic Mask Scaling System

Very compact double sided fully automated collimated exposure system including independent artwork scaling for an overall registration accuracy of ± 5 μm in reference to drill picture.

Hap5030i
Exposure systems

Hakuto
HAP 5030iS / HAP 5030iST

Double sided full automatic Mask Scaling System

Very compact double sided fully automated collimated exposure system including independent artwork scaling for an overall registration accuracy of ± 5 μm in reference to drill picture.

Hap5030i
Exposure systems

Highlights

  • Photomask-scaling function
  • Alignment accuracy 5 μm
  • High performance and productivity
  • High resolution down to 10 μm
  • Table carrier system
  • Contactless centering device
  • Collimated light source
       Intensity ≥ 50 mW/cm2
       Uniformity ≥ 90%
       Collimated half angle ≤1,5°

Please contact ...

Hans-fritz

Hans Fritz
SAT Vertrieb
+49 8061 35060
hans.fritz@sat.eu

Ask us, we will gladly contact you ...


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