TDK Load Port Series
TDK offers a wide range of load port systems developed for 200 mm and 300 mm wafer, tape frame and panel-level processes. Each platform is engineered for precision, reliability and cleanroom-grade operation, ensuring seamless integration with EFEMs, cluster tools and backend equipment.
TDK Load Port Series
TDK’s load port lineup covers 200 mm and 300 mm wafer, tape frame and panel-level applications. All systems are engineered for easy integration with EFEMs, cluster tools and backend equipment.
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+49 80 61 - 35 06 0
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sales@sat.eu