HAP 5030iS / 5030iST

Automatic Exposure System

Highlights

  • Photomask-scaling function
  • Alignment accuracy 5 µm
  • High performance and productivity
  • High resolution down to 10 µm
  • Table carrier system
  • Contactless centering device
  • Collimated light source
         Intensity >= 50 mW/cm2
         Uniformity >= 90%
         Collimated half angle <= 1,5°


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HAP 5030iS / 5030iST

Very compact double sided fully automated collimated exposure system including independent artwork scaling for an overall registration accuracy of +/- 5 µm in reference to drill picture.


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